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Title:
【発明の名称】半導体装置の製造方法及び膜生長装置
Document Type and Number:
Japanese Patent JP2693880
Kind Code:
B2
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Inventors:
Kazuo Takahashi
Application Number:
JP15366491A
Publication Date:
December 24, 1997
Filing Date:
June 26, 1991
Export Citation:
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Assignee:
Yamagata NEC Corporation
International Classes:
H01L21/205; C23C16/52; C30B25/16; H01L21/31; (IPC1-7): H01L21/205; C23C16/52; C30B25/16; H01L21/31
Domestic Patent References:
JP6077414A
JP5881968A
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)



 
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