Title:
【発明の名称】基板搬送装置
Document Type and Number:
Japanese Patent JP2708155
Kind Code:
B2
Inventors:
Takaichi Susumu
Makoto Seno
Koichi Morita
Yoshihiko Misawa
Fujiwara Soura
Makoto Seno
Koichi Morita
Yoshihiko Misawa
Fujiwara Soura
Application Number:
JP18448787A
Publication Date:
February 04, 1998
Filing Date:
July 23, 1987
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
H05K13/04; B65H5/10; H05K13/02; (IPC1-7): H05K13/02; B65H5/10
Domestic Patent References:
| JP60798A | ||||
| JP5745993A |
Attorney, Agent or Firm:
Yoshihiro Morimoto