Title:
【発明の名称】電界効果トランジスタのゲート形成方法とその形成領域の形成方法
Document Type and Number:
Japanese Patent JP2746539
Kind Code:
B2
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Inventors:
RI SHINKI
SAI SOSHU
IN KYOSHO
BOKU CHURUJUN
YU KEISHUN
BOKU KYOMO
SAI SOSHU
IN KYOSHO
BOKU CHURUJUN
YU KEISHUN
BOKU KYOMO
Application Number:
JP31538694A
Publication Date:
May 06, 1998
Filing Date:
December 19, 1994
Export Citation:
Assignee:
KANKOKU DENSHI TSUSHIN KENKYUIN
International Classes:
H01L21/027; H01L21/336; H01L21/338; H01L29/778; H01L29/78; H01L29/786; H01L29/812; (IPC1-7): H01L21/338; H01L21/027; H01L29/778; H01L29/812
Domestic Patent References:
| JP1220829A | ||||
| JP298147A | ||||
| JP1243476A | ||||
| JP55105326A | ||||
| JP6177370A | ||||
| JP6112112A |
Attorney, Agent or Firm:
Shigeaki Yoshida (2 outside)