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Title:
【発明の名称】電子ビーム励起プラズマ発生装置
Document Type and Number:
Japanese Patent JP2848590
Kind Code:
B1
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Inventors:
Ryuji Makoto
Yukitaka Mori
Application Number:
JP1318898A
Publication Date:
January 20, 1999
Filing Date:
January 08, 1998
Export Citation:
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Assignee:
Kawasaki Heavy Industries, Ltd.
International Classes:
H05H1/24; C23C16/50; H01L21/205; H01L21/302; H01L21/3065; (IPC1-7): H05H1/24; C23C16/50; H01L21/205; H01L21/3065
Domestic Patent References:
JP657435A
Attorney, Agent or Firm:
Seki Seiji



 
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