Title:
【発明の名称】パターン形成方法
Document Type and Number:
Japanese Patent JP2860399
Kind Code:
B2
More Like This:
Inventors:
TADA TETSUYA
KANAYAMA TOSHIHIKO
KANAYAMA TOSHIHIKO
Application Number:
JP3722296A
Publication Date:
February 24, 1999
Filing Date:
January 31, 1996
Export Citation:
Assignee:
KOGYO GIJUTSU INCHO
International Classes:
G03F7/038; H01L21/027; (IPC1-7): G03F7/038; H01L21/027
Domestic Patent References:
| JP7134413A | ||||
| JP733751A | ||||
| JP6167812A | ||||
| JP619136A |
Attorney, Agent or Firm:
Director, Institute of Industrial Technology Integration, Institute of Industrial Technology