Title:
【発明の名称】シリコーン樹脂組成物及びこれを用いたケイ酸ガラス薄膜の製造方法
Document Type and Number:
Japanese Patent JP2868672
Kind Code:
B2
Inventors:
ITO TOSHIO
SAKATA YOSHIKAZU
YAMAJI TETSUO
IGARASHI YASUSHI
SAKATA YOSHIKAZU
YAMAJI TETSUO
IGARASHI YASUSHI
Application Number:
JP23100492A
Publication Date:
March 10, 1999
Filing Date:
August 31, 1992
Export Citation:
Assignee:
OKI DENKI KOGYO KK
International Classes:
C03C3/04; C08K5/00; C08L83/02; C08L83/04; G03F7/004; G03F7/075; H01L21/027; H01L21/30; H01L21/312; (IPC1-7): C08L83/04; C03C3/04; C08K5/00; C08L83/02; G03F7/004; G03F7/075; H01L21/312
Domestic Patent References:
| JP470662A | ||||
| JP4159322A | ||||
| JP5271417A |
Attorney, Agent or Firm:
Takashi Ogaki