Title:
【発明の名称】薄膜のエッチング方法
Document Type and Number:
Japanese Patent JP2936265
Kind Code:
B2
Inventors:
MOTSUTE SHUNICHI
Application Number:
JP13873488A
Publication Date:
August 23, 1999
Filing Date:
June 06, 1988
Export Citation:
Assignee:
SEIKOO INSUTSURUMENTSU KK
International Classes:
C23F4/00; H01L21/302; H01L21/3065; H01L29/423; (IPC1-7): C23F4/00; H01L21/3065
Domestic Patent References:
| JP61168924A |
Attorney, Agent or Firm:
Keinosuke Hayashi