Title:
【発明の名称】エキシマレーザ装置
Document Type and Number:
Japanese Patent JP2936264
Kind Code:
B2
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Inventors:
WAKABAYASHI OSAMU
AMADA YOSHIHO
AMADA YOSHIHO
Application Number:
JP7952488A
Publication Date:
August 23, 1999
Filing Date:
March 31, 1988
Export Citation:
Assignee:
KOMATSU SEISAKUSHO KK
International Classes:
H01S3/097; H01S3/03; H01S3/036; H01S3/225; H02M1/00; (IPC1-7): H01S3/03; H01S3/225
Domestic Patent References:
| JP637683A | ||||
| JP6255978A | ||||
| JP6340233A | ||||
| JP62152188A | ||||
| JP62101258U | ||||
| JP5872863U |
Attorney, Agent or Firm:
Kimura Takahisa