Title:
【発明の名称】荷電ビーム装置
Document Type and Number:
Japanese Patent JP2941328
Kind Code:
B2
Abstract:
A charged particle beam device radiates a primary charged particle beam of pulse form on a surface of a specimen, once in each clock period, in synchronism with a clock signal that determines an operating period of an internal operating signal of the specimen. A secondary electron or a reflected electron is detected after it is emitted from the surface of the specimen when the primary charged particle beam of pulse form is irradiated. Each detected signal pulse which is generated from the detecting means once in each period of said clock is sampled at two or more positions in a range including the peak value, and data which correspond to the sum or the averaged value calculated from the sampling values of a plurality of the positions are formed. An internal operating signal waveform of said specimen is displayed by using the data, and therefore the internal operating signal waveform of the specimen can be observed and measured with high measuring accuracy and with high efficiency.
Inventors:
TODOKORO HIDEO
SHINADA HIROYUKI
FUKUHARA SATORU
SHINADA HIROYUKI
FUKUHARA SATORU
Application Number:
JP2197390A
Publication Date:
August 25, 1999
Filing Date:
February 02, 1990
Export Citation:
Assignee:
HITACHI SEISAKUSHO KK
International Classes:
G01Q30/04; G01R31/305; G01R31/302; H01J37/28; (IPC1-7): G01R31/302
Domestic Patent References:
| JP61124046A | ||||
| JP6010635A |
Attorney, Agent or Firm:
Katsuo Ogawa (1 person outside)