Title:
【発明の名称】IC用タブレットのシャトル収納装置
Document Type and Number:
Japanese Patent JP2974620
Kind Code:
B2
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Inventors:
KISHI JUICHI
Application Number:
JP24165396A
Publication Date:
November 10, 1999
Filing Date:
September 12, 1996
Export Citation:
Assignee:
SUMITOMO JUKIKAI KOGYO KK
International Classes:
H01L21/56; (IPC1-7): H01L21/56
Domestic Patent References:
| JP5972734A | ||||
| JP295810A | ||||
| JP9314612A |
Attorney, Agent or Firm:
Takehiro Makino (2 outside)