Title:
【発明の名称】回路基板検査装置
Document Type and Number:
Japanese Patent JP3042035
Kind Code:
B2
Abstract:
PURPOSE:To perform the alignment of upper and under surface pattern electrodes with upper and under surface inspection electrodes with high accuracy by moving a lower inspection jig within the plane parallel to a board to be inspected to perform the alignment of upper and under surfaces. CONSTITUTION:A lower position detecting camera 52 detects the positional shift of an under surface pattern electrode 12 to an under surface inspection electrode 31 when a board 10 to be inspected is arranged above a lower inspection jig 30 through a gap in opposed relationship. An upper position detecting camera 53 detects the positional shift of an upper surface pattern electrode 11 to an upper surface inspection electrode 21 when the board 10 is held to the upper surface of the jig 30 in a contact state. A lower inspection jig moving table 54 receives the detection signal from the camera 52 to move the jig 30 so as to correct the positional shift state of the electrode 12 to the electrode 31 and receives the detection signal from the camera to move the jig 30 having the board 10 held thereto so as to correct the positional shift state of the electrode 11 to the electrode 21.
Inventors:
Yuichi Haruta
Kiyoshi Kimura
Yasuhiro Mori
Kiyoshi Kimura
Yasuhiro Mori
Application Number:
JP15619691A
Publication Date:
May 15, 2000
Filing Date:
May 31, 1991
Export Citation:
Assignee:
JSR Corporation
International Classes:
G01R31/28; G01R31/02; (IPC1-7): G01R31/02; G01R31/28
Domestic Patent References:
| JP262974A | ||||
| JP62254279A | ||||
| JP1184473A | ||||
| JP6057269A | ||||
| JP4120377U | ||||
| JP424076U |
Attorney, Agent or Firm:
Masahiko Ohi
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