Title:
【発明の名称】多層配線構造の製造方法
Document Type and Number:
Japanese Patent JP3133842
Kind Code:
B2
Inventors:
Hiroshi Yamamoto
Yoshihiro Ohta
Yoshihiro Ohta
Application Number:
JP28180292A
Publication Date:
February 13, 2001
Filing Date:
October 20, 1992
Export Citation:
Assignee:
Kawasaki Steel Co., Ltd.
International Classes:
H01L23/52; H01L21/3205; H01L21/768; (IPC1-7): H01L21/768; H01L21/3205
Domestic Patent References:
| JP1243551A | ||||
| JP63318139A | ||||
| JP3203325A | ||||
| JP369121A | ||||
| JP280575A |
Attorney, Agent or Firm:
Akihide Sugimura (5 outside)