Title:
【発明の名称】薄膜半導体装置
Document Type and Number:
Japanese Patent JP3142893
Kind Code:
B2
Inventors:
Goichi Otaka
Application Number:
JP12230191A
Publication Date:
March 07, 2001
Filing Date:
April 24, 1991
Export Citation:
Assignee:
株式会社リコー
リコー応用電子研究所株式会社
リコー応用電子研究所株式会社
International Classes:
H01L21/20; H01L29/78; H01L29/786; (IPC1-7): H01L21/20; H01L29/786
Domestic Patent References:
| JP3174718A |
Attorney, Agent or Firm:
Eiji Tomomatsu