Title:
【発明の名称】露光方法及び装置
Document Type and Number:
Japanese Patent JP3316830
Kind Code:
B2
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Inventors:
Yuji Imai
Application Number:
JP35006991A
Publication Date:
August 19, 2002
Filing Date:
December 10, 1991
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; G03F9/00; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; G03F7/20; G03F9/00
Domestic Patent References:
| JP1273318A | ||||
| JP6018738A | ||||
| JP63213341A | ||||
| JP6026343A | ||||
| JP4348019A | ||||
| JP334233U |
Attorney, Agent or Firm:
Satoshi Ohmori