Title:
【発明の名称】配線形成法
Document Type and Number:
Japanese Patent JP3331756
Kind Code:
B2
Inventors:
Hibino 34
Application Number:
JP16740994A
Publication Date:
October 07, 2002
Filing Date:
June 27, 1994
Export Citation:
Assignee:
Yamaha Corporation
International Classes:
H01L21/28; H01L21/3205; (IPC1-7): H01L21/3205; H01L21/28
Domestic Patent References:
| JP6169019A | ||||
| JP6295906A | ||||
| JP56867A |
Attorney, Agent or Firm:
Toshiaki Izawa