Title:
【発明の名称】基板検査装置および基板検査方法
Document Type and Number:
Japanese Patent JP3361311
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a device and a method for inspecting substrates in a short inspection time capable of being applied to a high-density substrate. SOLUTION: A computer 44 transmits instructions to a switch part SW1 to turn only a switch SW1a on and to turn other switches off. By this, only a probe 40a is connected to a signal source 46, and other probes are not connected to the signal source 46. By this, the printed pattern 34a of a substrate 32 is selected to be an object of inspection. When the switch SW1a is turned on, an equivalent circuit is closed to pass a current (i). After a voltage Vx is amplified by an amplifier, a maximum value is detected and held by a peak hold circuit. The peak hold circuit is provided with a D/A converter, and the digitized maximum value is transmitted to the computer 44 to determine the state of continuity of the printed pattern 34a of the substrate 32 on the basis of the maximum value. An input voltage Vx to the amplifier displays the maximum voltage approximately simultaneously with the turning-on of the switch SW1a.
Inventors:
Munehiro Yamashita
Application Number:
JP2000085203A
Publication Date:
January 07, 2003
Filing Date:
March 24, 2000
Export Citation:
Assignee:
Nidec Read Corporation
International Classes:
G01R31/02; (IPC1-7): G01R31/02
Domestic Patent References:
| JP4244976A | ||||
| JP8226949A | ||||
| JP7146323A |
Attorney, Agent or Firm:
Minoru Nakamura (9 outside)