Title:
【発明の名称】分割光センサ-用アバランシェフォトダイオ-ド
Document Type and Number:
Japanese Patent JP3364989
Kind Code:
B2
Abstract:
PURPOSE:To prevent increase in dark current and increase in Junction capacity and to achieve designing with a high degree of freedom using a narrow split line by allowing a channel cut diffusion layer constituting the split line to have a lower impurity concentration than that of the channel cut diffusion layer at other parts. CONSTITUTION:A channel diffusion layer is formed by separate impurity concentration for a split line part 17 within four light reception parts 9, 10, 11, and 12 at a center and other light shielding parts 18. Namely, the impurity concentration of the channel cut diffusion layer at the split line part 17 is minimized as much as possible while that of the channel cut diffusion layer of other light shielding parts 18 is increased, thus preventing reduction in breakdown voltage due to generation of reach through at the channel cut diffusion layer at the split line part 17 and at the same time preventing conductive type inversion due to inverse bias of a channel cut diffusion layer 3B at the other light shielding parts 18 below wiring 16.
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Inventors:
Koji Kobayashi
Application Number:
JP16730493A
Publication Date:
January 08, 2003
Filing Date:
June 15, 1993
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L31/107; H01L31/16; (IPC1-7): H01L31/16; H01L31/107
Domestic Patent References:
| JP632387A | ||||
| JP343746U |