Title:
ビスマス含有セラミックス層の製造方法
Document Type and Number:
Japanese Patent JP3571229
Kind Code:
B2
Abstract:
A bismuth-containing ceramic layer is produced using a bismuth precursor dissolved in a formic, acetic or propionic acid solvent. A ceramic layer is produced by (a) dissolving a bismuth precursor in a solvent of an organic acid of formula CnH2n+1COOH (n = 0, 1 or 2) and optionally water; (b) dissolving a further precursor in a further solvent and/or providing a further precursor in the liquid state; and (c) applying the precursors to a substrate and heating. Preferred Feature: The further solvent is the same organic acid or tetrahydrofuran. A strontium-bismuth tantalate layer is formed using a solution of Bi(OAc)3 and Sr(OAc)2 in acetic acid which is heated to above the melting point of a tantalum-containing precursor before mixing with the tantalum-containing precursor in the liquid state.
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Inventors:
Frank Hintermeier
Carlos Mature-Espeyo
Carlos Mature-Espeyo
Application Number:
JP27553598A
Publication Date:
September 29, 2004
Filing Date:
September 29, 1998
Export Citation:
Assignee:
Siemens Aktiengesellschaft
International Classes:
B05D7/24; C01G29/00; C01G35/00; C23C16/40; C23C18/12; H01L21/316; H01L21/8242; H01L21/8246; H01L27/10; H01L27/105; H01L27/108; H01L41/24; H01L21/314; (IPC1-7): C01G35/00; B05D7/24; H01L21/8242; H01L27/10; H01L27/108
Domestic Patent References:
| JP8340084A | ||||
| JP8319160A | ||||
| JP3295808A | ||||
| JP5247650A |
Attorney, Agent or Firm:
Iwao Yamaguchi