Title:
ポリッシング装置および方法
Document Type and Number:
Japanese Patent JP3583491
Kind Code:
B2
Inventors:
Toyomi Nishi
Tetsuji Togawa
Yajima Hiroumi
Yukio Imoto
Shoichi Kodama
Riichiro Aoki
Tetsuji Togawa
Yajima Hiroumi
Yukio Imoto
Shoichi Kodama
Riichiro Aoki
Application Number:
JP33916694A
Publication Date:
November 04, 2004
Filing Date:
December 28, 1994
Export Citation:
Assignee:
Ebara Corporation
Toshiba Corporation
Toshiba Corporation
International Classes:
B24B37/04; (IPC1-7): B24B37/04
Domestic Patent References:
| JP6005568A | ||||
| JP63207559A | ||||
| JP63185574A |
Attorney, Agent or Firm:
Isamu Watanabe
Shintaro Hotta
Shintaro Hotta