基板上の埋めこまれたライン機構の曲率を確認する方法

Title:

基板上の埋めこまれたライン機構の曲率を確認する方法

Document Type and Number:

Japanese Patent JP3949964

Kind Code:

B2

Abstract:

Methods and systems for evaluating stresses in line features formed on substrates. Stresses may be computed from measured curvature information based on simple analytical functions. The curvature information can be obtained optically by, e.g., a coherent gradient sensing method, to obtain a full-field measurement of an illuminated area.

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Inventors:

Thresh Subra
Park Tae-Soon

Application Number:

JP2001578898A

Publication Date:

July 25, 2007

Filing Date:

April 25, 2001

Export Citation:

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Assignee:

California Institute of Technology

International Classes:

H01L21/02; H01L21/66; H01L21/3205; H01L23/544; H01L29/00

Attorney, Agent or Firm:

Sakio Oba
Shinji Kato
Toshikazu Higuchi

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