膜状構成要素の製造方法 - Seiko Epson Corporation

Title:

膜状構成要素の製造方法

Document Type and Number:

Japanese Patent JP3979354

Kind Code:

B2

Abstract:

A discharging apparatus has a substrate holding part 32 which holds a substrate S; an discharging head 34 which discharges a liquid material onto the substrate S; an ion producing device 38 which provides an ionized wind on the substrate S; an exhaust device 40 which is placed on a direction where the ionized wind from the ionized wind producing device 38 is blowing, and the ionized wind is provided toward the liquid material on the substrate S, at least, immediately after discharging the liquid material onto the substrate S.

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Inventors:

Yuji Iwata

Application Number:

JP2003199893A

Publication Date:

September 19, 2007

Filing Date:

July 22, 2003

Export Citation:

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Assignee:

Seiko Epson Corporation

International Classes:

B05D1/26; B05C5/00; G02B5/20; B05D3/12; B41J2/01; C23C4/12; C23C6/00; C23C26/02

Domestic Patent References:

JP11281810A
JP4057280U
JP8117668A
JP2001234356A
JP2000288442A
JP2002169013A

Attorney, Agent or Firm:

Kazuya Nishi
Masatake Shiga
Masakazu Aoyama

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