Title:
ランプアニール装置
Document Type and Number:
Japanese Patent JP3998700
Kind Code:
B2
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Inventors:
Hideki Suzuki
Application Number:
JP2006259310A
Publication Date:
October 31, 2007
Filing Date:
September 25, 2006
Export Citation:
Assignee:
NEC Electronics Corporation
International Classes:
H01L21/26; H01L21/31
Domestic Patent References:
| JP2000516772A | ||||
| JP8340007A |
Foreign References:
| WO1998051844A1 |
Attorney, Agent or Firm:
Mitsuhiro Hamada