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Title:
エピタキシャルウェーハの製造方法
Document Type and Number:
Japanese Patent JP4126879
Kind Code:
B2
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Inventors:
Yoshinori Shirakawa
Shigeru Umeno
Eiichi Asayama
Application Number:
JP2001041214A
Publication Date:
July 30, 2008
Filing Date:
February 19, 2001
Export Citation:
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Assignee:
Sumco inc.
International Classes:
C30B29/06; H01L21/205; H01L21/208; H01L21/322
Domestic Patent References:
JP2001151596A
JP9199507A
Foreign References:
WO2000055397A1
Attorney, Agent or Firm:
Michio Mori
Terutada Hogami



 
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