Title:
プラズマアシスト蒸着装置及びその制御方法
Document Type and Number:
Japanese Patent JP4170260
Kind Code:
B2
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Inventors:
Ryuichi Iida
Application Number:
JP2004167066A
Publication Date:
October 22, 2008
Filing Date:
June 04, 2004
Export Citation:
Assignee:
Tsukishima Machinery Co., Ltd.
International Classes:
C23C14/24
Domestic Patent References:
| JP5009728A | ||||
| JP7072307A |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama