Title:
ポジ型感光性組成物
Document Type and Number:
Japanese Patent JP4226803
Kind Code:
B2
Inventors:
Kunihiko Kodama
Toshiaki Aoi
Toshiaki Aoi
Application Number:
JP2001188670A
Publication Date:
February 18, 2009
Filing Date:
June 21, 2001
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/039; G03F7/004; H01L21/027
Domestic Patent References:
JP11125907A | ||||
JP11012326A | ||||
JP2000147775A | ||||
JP2000194135A |
Attorney, Agent or Firm:
Takeshi Takamatsu
Kiyozumi Yazawa
Kiyozumi Yazawa