Title:
基板運搬装置
Document Type and Number:
Japanese Patent JP4255676
Kind Code:
B2
Inventors:
Masahiro Miyoshi
Fumio Nakasa
Fumio Nakasa
Application Number:
JP2002318467A
Publication Date:
April 15, 2009
Filing Date:
October 31, 2002
Export Citation:
Assignee:
Sharp Corporation
International Classes:
B25J9/06; B65G49/06; H01L21/677; H01L21/68
Domestic Patent References:
| JP2003309161A | ||||
| JP11220001A | ||||
| JP2000263382A |
Attorney, Agent or Firm:
Kenzo Hara International Patent Office