Title:
位置決め装置、露光装置およびデバイス製造方法
Document Type and Number:
Japanese Patent JP4261979
Kind Code:
B2
Abstract:
In driving a movable body in a target direction, a force in another direction, which may act on the movable body, is reduced. A system includes a current amplifier, which drives X1 and X2 electromagnets (a first actuator) for aligning the movable body in the X direction, a system including a current amplifier, which drives Y1 and Y2 electromagnets (a second actuator) for aligning the movable body in the Y direction, a subordinate direction component correction unit, which reduces a force in the Y direction acting on the movable body when driving the movable body in the X direction by the first actuator, and a subordinate direction component correction unit, which reduces a force in the X direction acting on the movable body when driving the movable body in the Y direction by the second actuator.
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Inventors:
Hirohito Ito
Application Number:
JP2003133535A
Publication Date:
May 13, 2009
Filing Date:
May 12, 2003
Export Citation:
Assignee:
Canon Inc
International Classes:
B23Q15/00; G05D3/12; G03F7/20; H01L21/027; H01L21/68; H02K41/035
Domestic Patent References:
| JP2000353002A | ||||
| JP2000106344A | ||||
| JP2000267732A | ||||
| JP2001107961A | ||||
| JP200161269A | ||||
| JP5302641A |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu