Title:
位置決め装置及び露光装置
Document Type and Number:
Japanese Patent JP4266713
Kind Code:
B2
Abstract:
An alignment apparatus includes a first support member having a reference surface which movably supports an object, a driving unit which moves the object in at least one direction on the reference surface and aligns the object at a predetermined position, and a second support member which is provided separately from the first support member and supports a heating unit of the driving unit through a bearing.
Inventors:
Takenori Emoto
Application Number:
JP2003158598A
Publication Date:
May 20, 2009
Filing Date:
June 03, 2003
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; G03F7/20; H01L21/68; G12B5/00
Domestic Patent References:
| JP10328962A | ||||
| JP6254734A | ||||
| JP2000029530A |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura