Title:
走査電子顕微鏡及び寸法校正用試料
Document Type and Number:
Japanese Patent JP4276140
Kind Code:
B2
Abstract:
A calibration standard specimen is provided to have formed therein calibrating patterns of a lattice shape discontinuously arrayed, and particular alignment patterns respectively disposed near the calibrating patterns so that the positioning of the specimen can be made to match the calibrating patterns to the measurement points.
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Inventors:
Tsuyoshi Mizuno
Hiroki Kawada
Hiroki Kawada
Application Number:
JP2004188495A
Publication Date:
June 10, 2009
Filing Date:
June 25, 2004
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
G01B15/00; G01N23/00; G01N23/225; H01J37/20; H01J37/28; H01L23/544
Domestic Patent References:
| JP2004177149A | ||||
| JP8031363A | ||||
| JP2003279321A | ||||
| JP9275074A | ||||
| JP1187409A | ||||
| JP2005241328A | ||||
| JP2004340838A | ||||
| JP2004251682A | ||||
| JP8285502A |
Foreign References:
| US6570157 |
Attorney, Agent or Firm:
Yusuke Hiraki
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