Title:
ホモジナイザ
Document Type and Number:
Japanese Patent JP4302526
Kind Code:
B2
Abstract:
An aspect of the present invention includes a method for homogenizing a beam of electromagnetic radiation. Said beam of electromagnetic radiation is impinged onto a first array of deflecting elements. Said beam of electromagnetic radiation is dispersed into a number of spatially separated beamlets by said first array of deflecting elements. Said beamlets are deflected by said first array of deflecting elements. Said deflected beamlets are impinged onto a second array of deflecting elements. Said beamlets are superimposed at a target plane to thereby form a radiation beam having a homogenized spatial intensity distribution. The invention also relates to an apparatus for homogenizing a beam of electromagnetic radiation.
Inventors:
Sandström, Torbjörn
Application Number:
JP2003549975A
Publication Date:
July 29, 2009
Filing Date:
December 05, 2002
Export Citation:
Assignee:
Micronic Laser Systems Activora Get
International Classes:
G02B27/09; G03F7/20; H01L21/027
Domestic Patent References:
| JP2098919A | ||||
| JP2001297959A | ||||
| JP61169815A | ||||
| JP8152594A | ||||
| JP11038364A | ||||
| JP2000206449A | ||||
| JP11344683A | ||||
| JP11271669A | ||||
| JP11064792A |
Attorney, Agent or Firm:
Hideto Asamura
Hajime Asamura
Toru Mori
Yukio Iwamoto
Hajime Asamura
Toru Mori
Yukio Iwamoto