Title:
板状物の搬送機構
Document Type and Number:
Japanese Patent JP4323129
Kind Code:
B2
Abstract:
A conveying apparatus for conveying a plate-like object that is affixed to the top surface of a protective tape mounted to cover the inside opening of a support frame formed in an annular form, comprising a suction-holding member having a negative pressure chamber which is open at the bottom and an annular contact portion to be contacted to the top surface of the support frame on the under surface, the negative pressure chamber being connected to a suction-source; and a moving unit for moving the suction-holding member between a first predetermined position and a second predetermined position.
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Inventors:
Naoki Omiya
Satoshi Tateiwa
Satoshi Tateiwa
Application Number:
JP2002038682A
Publication Date:
September 02, 2009
Filing Date:
February 15, 2002
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B25J15/06; H01L21/677; H01L21/301; H01L21/683
Domestic Patent References:
| JP4188848A | ||||
| JP2001358093A |
Attorney, Agent or Firm:
Naozumi Ono