Title:
光学位置測定装置
Document Type and Number:
Japanese Patent JP4358387
Kind Code:
B2
Abstract:
The unit has a measuring rod (M) with a reference marking structure (10), which is connected to one object and has an even number of blocks (BM1-BM3), which have sequential arrangements of light (10d) and dark (10u) part areas, and a scanning unit (AE), which is connected to the other object and has a scanning plate (A) with a scanning reference marking structure (20) and several detector elements (D1-D3). The scanning reference structure has the same number of blocks (BA1-BA3), which are arranged sequentially in the measuring direction. At least one of a first group of the blocks of one of the reference marking structures is formed so that an intensity distribution is supplied at a reference position in the plane of the other reference marking structure, which is identical to the structure of a first group of blocks of the reference marking structure. At least one of a second group of the blocks of one of the reference marking structures is formed so that an intensity distribution is supplied at a reference position in the plane of the other reference marking structure, which is complementary to the structure of a second group of blocks of the reference marking structure. Each block of the scanning reference marking structure is assigned to a detector element. The detector elements are connected so that the output signals (RIGT,RIT) of a group of blocks are connected together and so that the output signals of each group of blocks each produce a reference pulse output signal, so that a defined relative position of the two objects produces a maximum or a minimum.
Inventors:
Wolfgang Holzapfuer
Talker Hofuel
Walter Hoover
Talker Hofuel
Walter Hoover
Application Number:
JP31871099A
Publication Date:
November 04, 2009
Filing Date:
November 09, 1999
Export Citation:
Assignee:
DR. JOHANNES HEIDENHAIN GESELLSCHAFT MIT BESCHRANKTER HAFTUNG
International Classes:
G01B11/00; G01D5/244; G01D5/245; G01D5/36
Domestic Patent References:
| JP60088317A | ||||
| JP62036923A | ||||
| JP63281015A |
Foreign References:
| EP0453971A1 |
Attorney, Agent or Firm:
Mitsufumi Esaki
Tsuneo Mihara
Okumura Yoshimichi
Blacksmith
Tsuneo Mihara
Okumura Yoshimichi
Blacksmith