Title:
ベルヌーイチャック
Document Type and Number:
Japanese Patent JP4359885
Kind Code:
B2
Inventors:
Kitamura Ikuo
Application Number:
JP2004158191A
Publication Date:
November 11, 2009
Filing Date:
May 27, 2004
Export Citation:
Assignee:
Shin-Etsu Semiconductor Co., Ltd.
International Classes:
B65G49/07; H01L21/677; H01L21/205; H01L21/68
Domestic Patent References:
| JP2004119784A | ||||
| JP5137575A | ||||
| JP8203984A | ||||
| JP9107022A | ||||
| JP200360015A | ||||
| JP2003203891A | ||||
| JP2253637A |
Attorney, Agent or Firm:
Masanori Sugawara