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Title:
基板搬送装置、基板保管搬送装置、基板搬入システム、基板搬出システム及び基板搬入/搬出システム
Document Type and Number:
Japanese Patent JP4371009
Kind Code:
B2
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Inventors:
Nozomi Ishibashi
Murayama
Application Number:
JP2004247394A
Publication Date:
November 25, 2009
Filing Date:
August 26, 2004
Export Citation:
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Assignee:
Ihi Co., Ltd.
International Classes:
B65G1/00; B65G49/06; B65G1/06; B65G7/06; H01L21/677; H01L21/68
Domestic Patent References:
JP2003118808A
JP2003063643A
JP6188232A
JP11079389A
Attorney, Agent or Firm:
Masatake Shiga
Takashi Watanabe



 
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