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Title:
半導体基板の製造方法及び電界効果型トランジスタの製造方法
Document Type and Number:
Japanese Patent JP4378904
Kind Code:
B2
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Inventors:
Ichiro Shiono
Kazuki Mizushima
Takeshi Yamaguchi
Application Number:
JP2001302747A
Publication Date:
December 09, 2009
Filing Date:
September 28, 2001
Export Citation:
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Assignee:
Sumco inc.
International Classes:
H01L21/20; H01L29/161; H01L21/205; H01L21/316; H01L29/78
Domestic Patent References:
JP2000243946A
JP7153685A
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama



 
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