Title:
位置決め装置の初期化方法、露光装置およびデバイス製造方法
Document Type and Number:
Japanese Patent JP4447949
Kind Code:
B2
Abstract:
In order to realize initializing sequences with high accuracy and high reproducibility, a positioning device according includes an XY slider movable in directions X and Y, an object position measuring device for measuring the position of the XY slider, an X beam guiding the XY slider in the direction Y and movable in the direction X, a Y beam guiding the XY slider in the direction X and movable in the direction Y, electromagnet units having at least two pairs of electromagnets provided on the XY slider in such a manner as to embrace side faces of the X beam and the Y beam, and a rotation regulating portion provided on the X beam for regulating the rotation of the X beam.
More Like This:
| JPH0732581 | [Title of Invention] Stepping Motor |
| JP2019187216 | CYLINDRICAL LINEAR MOTOR |
| JP5981103 | Linear motor |
Inventors:
Yugo Shibata
Application Number:
JP2004089502A
Publication Date:
April 07, 2010
Filing Date:
March 25, 2004
Export Citation:
Assignee:
Canon Inc
International Classes:
H02K41/03; B23Q15/22; G03F7/20; G05B19/19; H01L21/027; H01L21/68; H02K41/02; H02P7/00; H02P25/06; H02P25/064
Domestic Patent References:
| JP200495855A | ||||
| JP11316607A | ||||
| JP2003345445A | ||||
| JP85767A |
Attorney, Agent or Firm:
Keizo Nishiyama
Yuichi Uchio
Yuichi Uchio