Title:
基板ハンドラ、及び半導体基板洗浄システム
Document Type and Number:
Japanese Patent JP4448130
Kind Code:
B2
Abstract:
A substrate handler is provided comprising a carriage positionable along a first axis of motion, a first substrate gripper coupled to the carriage and positionable relative to the carriage along a second axis of motion oriented substantially perpendicular to the first axis of motion, and a second substrate gripper coupled to the carriage and positionable relative to the carriage along a third axis of motion oriented substantially parallel to the second axis of motion, wherein the second gripper is independently movable relative to the first gripper.
More Like This:
Inventors:
Akkire, Eunes
Malol, Dan
Carpra, Lakshmanan
Malol, Dan
Carpra, Lakshmanan
Application Number:
JP2006509545A
Publication Date:
April 07, 2010
Filing Date:
March 31, 2004
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01L21/677; B65G49/04; B65G49/07; H01L21/00; H01L21/304; H01L21/687
Domestic Patent References:
| JP6204197A | ||||
| JP63249145A | ||||
| JP8124992A | ||||
| JP8288362A | ||||
| JP10163302A | ||||
| JP6338486A |
Foreign References:
| EP1068936A1 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Ikeda adult
Junji Kashiwaoka
Yuichi Yamada
Ikeda adult
Junji Kashiwaoka
Yuichi Yamada