Title:
研磨パッドの交換方法,研磨パッドの動的粘弾性測定装置
Document Type and Number:
Japanese Patent JP4495398
Kind Code:
B2
Inventors:
Kazuya Miyazaki
Kazunori Ishikawa
Akio Tsumaga
Kazunori Ishikawa
Akio Tsumaga
Application Number:
JP2003013006A
Publication Date:
July 07, 2010
Filing Date:
January 22, 2003
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
G01N19/00; H01L21/304; B24B37/20; B24B37/24
Domestic Patent References:
| JP2002124491A | ||||
| JP2002371154A | ||||
| JP2002371121A | ||||
| JP2002370157A |
Foreign References:
| WO2002083757A1 |
Attorney, Agent or Firm:
Miaki Kametani
Tetsuo Kanamoto
Koji Hagiwara
Tetsuo Kanamoto
Koji Hagiwara