Title:
露光装置、露光方法、及び基板製造方法
Document Type and Number:
Japanese Patent JP4522142
Kind Code:
B2
Inventors:
Ryoji Nemoto
Yasuhiko Hara
Junichi Mori
Yasuhiko Hara
Junichi Mori
Application Number:
JP2004147250A
Publication Date:
August 11, 2010
Filing Date:
May 18, 2004
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
G02F1/13; G03F9/00; G03F7/20
Domestic Patent References:
| JP63158404A | ||||
| JP7253304A | ||||
| JP6267816A | ||||
| JP2002296806A | ||||
| JP2000035676A |
Attorney, Agent or Firm:
Kozo Takahashi