Title:
プラズマ処理装置
Document Type and Number:
Japanese Patent JP4574387
Kind Code:
B2
Inventors:
Hiroto Takeuchi
Nao Umeoka
Nao Umeoka
Application Number:
JP2005043637A
Publication Date:
November 04, 2010
Filing Date:
February 21, 2005
Export Citation:
Assignee:
Sekisui Chemical Co.,Ltd.
International Classes:
H05H1/24; B08B7/00
Domestic Patent References:
| JP10237197A | ||||
| JP11335868A | ||||
| JP2000349051A | ||||
| JP2004128417A | ||||
| JP2005033152A | ||||
| JP2003294896A |
Foreign References:
| WO2003071839A1 |
Attorney, Agent or Firm:
Noboru Watanabe
Harada Sanjugi
Harada Sanjugi