Title:
冷凍チャック装置
Document Type and Number:
Japanese Patent JP4665179
Kind Code:
B2
More Like This:
| JP4715814 | Seat expansion device and seat expansion method |
| JP4465690 | Vertical board holding device |
| WO/2017/217543 | ALIGNMENT METHOD AND ALIGNMENT DEVICE |
Inventors:
Atsushi Une
Application Number:
JP2008172292A
Publication Date:
April 06, 2011
Filing Date:
July 01, 2008
Export Citation:
Assignee:
General Manager, Technology Research Division, Ministry of Defense
International Classes:
H01L21/683
Domestic Patent References:
| JP7237066A | ||||
| JP11163103A | ||||
| JP2005262327A | ||||
| JP8066850A | ||||
| JP9007986A |
Attorney, Agent or Firm:
Norimitsu Nishimura