Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
基板の垂直保持装置
Document Type and Number:
Japanese Patent JP4465690
Kind Code:
B2
More Like This:
JP2020136622JIG FOR ADJUSTMENT, ADJUSTMENT METHOD, AND POSITION DEVIATION MEASUREMENT METHOD
JP6438352Heating device
JP5848205How to separate the mounted device wafer from the carrier substrate
Inventors:
Matsumitsu Yoshimitsu
Application Number:
JP2009228374A
Publication Date:
May 19, 2010
Filing Date:
September 30, 2009
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
Kuroda Seiko Co., Ltd.
International Classes:
H01L21/683; G12B5/00
Domestic Patent References:
JP3010251A
JP2000031250A
JP2003034428A
JP10333337A
JP2001166494A
Attorney, Agent or Firm:
Patent business corporation Takahashi Matsumoto & Partners



 
Previous Patent: 固着具と成形品部材

Next Patent: メガネ固定具