Title:
薄膜成膜装置
Document Type and Number:
Japanese Patent JP4693759
Kind Code:
B2
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Inventors:
Cai Kisei
Application Number:
JP2006334701A
Publication Date:
June 01, 2011
Filing Date:
December 12, 2006
Export Citation:
Assignee:
LG Display Company Limited
International Classes:
C23C16/509; C23C16/34; H01L21/31; H01L21/318; H01L21/336; H01L29/786
Domestic Patent References:
| JP4006820A | ||||
| JP7115062A | ||||
| JP9326387A | ||||
| JP63050877U | ||||
| JP63117469A | ||||
| JP2244676A | ||||
| JP4120733A |
Attorney, Agent or Firm:
Sonoda Yoshitaka
Kobayashi Yoshinori
Kobayashi Yoshinori