Title:
電気光学装置用基板の製造方法
Document Type and Number:
Japanese Patent JP4701487
Kind Code:
B2
Inventors:
Yukiya Hirabayashi
Application Number:
JP2000288460A
Publication Date:
June 15, 2011
Filing Date:
September 22, 2000
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G02F1/1333; H01L29/786; G02F1/136; G02F1/1368; H01L21/02; H01L21/304; H01L21/336; H01L27/12
Domestic Patent References:
| JP10293320A | ||||
| JP4133033A | ||||
| JP6230431A | ||||
| JP11121758A |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Osamu Suzawa