Title:
電子ビーム蒸着用電子銃、蒸着材料保持装置、及び蒸着装置
Document Type and Number:
Japanese Patent JP4701486
Kind Code:
B2
Inventors:
Kazutoshi Setoguchi
Nakamura Taizo
Koji Yamaguchi
Naoto Kushima
Nobuyoshi Mishima
Nakamura Taizo
Koji Yamaguchi
Naoto Kushima
Nobuyoshi Mishima
Application Number:
JP2000282495A
Publication Date:
June 15, 2011
Filing Date:
September 18, 2000
Export Citation:
Assignee:
Epson Toyocom Corporation
International Classes:
C23C14/24; C23C14/30; H01J37/06
Domestic Patent References:
| JP62114055U | ||||
| JP6272028A | ||||
| JP3061357A | ||||
| JP8225927A | ||||
| JP5056951U | ||||
| JP9031633A |
Attorney, Agent or Firm:
Hitoshi Suzuki