Title:
加工液供給装置
Document Type and Number:
Japanese Patent JP4744701
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a machining fluid supplying system which allows the pump to ensure a flow rate equivalent to the minimum permissible flow rate of the pump even when a flow rate supplied to the machining area is less than the minimum permissible flow rate of the pump provided in the system. SOLUTION: The machining fluid supplying system is provided with a pump, a first passage which connects the pump with the source of machining fluid, a second passage which serves to feed machining fluid delivered from the pump to the machining area in which a workpiece held with a work holding means is processed, and a flow control valve which is located in the second passage; besides provided with a circulating passage which connects a point in the second passage between the flow control valve and the pump with the first passage so that the machining fluid equivalent to the minimum permissible flow rate for the pump is circulated through the circulating passage.
Inventors:
Miki Yoshida
Ken Arai
Ken Arai
Application Number:
JP2001019842A
Publication Date:
August 10, 2011
Filing Date:
January 29, 2001
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B23Q11/10; B23Q11/00; F04B49/06; H01L21/304
Domestic Patent References:
| JP8141879A | ||||
| JP6189454U | ||||
| JP2000265968A | ||||
| JP2000289078A | ||||
| JP7133765A | ||||
| JP60194186U |
Attorney, Agent or Firm:
Naozumi Ono