Title:
静電チャックヒータ
Document Type and Number:
Japanese Patent JP4762208
Kind Code:
B2
Abstract:
An electrostatic chuck heater including a base which is formed by: applying conductive paste containing a binder to upper and lower surfaces of an alumina sintered body to print an electrostatic electrode and heater electrode; calcining the alumina sintered body; arranging alumina powder above the electrostatic electrode and alumina powder below the heater electrode; and pressing the alumina powder and alumina sintered body in the above state for pressure sintering. The diffusion area ratio of the conductive material near the electrostatic electrode in the dielectric layer is set not more.
Inventors:
Yutaka Mori
Ryoho Hattori
Takeshi Torigoe
Ryoho Hattori
Takeshi Torigoe
Application Number:
JP2007184677A
Publication Date:
August 31, 2011
Filing Date:
July 13, 2007
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
H01L21/683; H02N13/00
Domestic Patent References:
| JP9213455A | ||||
| JP2005343733A | ||||
| JP8205568A |
Attorney, Agent or Firm:
Aitec International Patent Office