Title:
ウェハの支持方法およびウェハ支持治具およびウェハ処理装置
Document Type and Number:
Japanese Patent JP4764584
Kind Code:
B2
More Like This:
Inventors:
Shunsuke Sato
Application Number:
JP2001385322A
Publication Date:
September 07, 2011
Filing Date:
December 18, 2001
Export Citation:
Assignee:
Great Vacuum Co., Ltd.
International Classes:
B65G49/02; C30B33/08; H01L21/306; H01L21/68; H01L21/683
Domestic Patent References:
| JP4911062A |