Title:
半導体装置及び半導体装置の製造方法
Document Type and Number:
Japanese Patent JP4792996
Kind Code:
B2
Inventors:
Yuichi Hayasaki
Application Number:
JP2006018064A
Publication Date:
October 12, 2011
Filing Date:
January 26, 2006
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H01L23/52; H01L21/3205
Domestic Patent References:
| JP9045766A | ||||
| JP4023450A | ||||
| JP1309351A | ||||
| JP2003332270A | ||||
| JP6275713A |
Attorney, Agent or Firm:
Mutsumi Yanase
Masaaki Utsunomiya
Atsushi Watanabe
Harada victory
Masaaki Utsunomiya
Atsushi Watanabe
Harada victory