Title:
積層ヒータ用高電力電気コネクタ及び処理チャンバ蓋組立体
Document Type and Number:
Japanese Patent JP4846850
Kind Code:
B2
Abstract:
An electrical connector has a non-conductive outer housing and a spring-loaded conductive assembly mounted within. The non-conductive outer housing has a longitudinal axis along which the spring-loaded conductive assembly is allowed to move over a limited range, in either direction. The conductive assembly includes a conductive contact pad and an conductive elongated shaft which are mated together within the non-conductive outer housing. A spring mounted along the contact shaft and in abutment therewith biases the contact shaft in a direction away from the contact base. When the electrical connector is employed in a chamber lid of a chamber lid assembly having an integrated laminated heater, such as for use in conjunction with a wafer processing chamber, the spring biases a lower surface of the contact shaft against the heater.
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Inventors:
Horodenko Arnold
Martin Russell
Rasnick John
Kimbal Christopher
Martin Russell
Rasnick John
Kimbal Christopher
Application Number:
JP2009553685A
Publication Date:
December 28, 2011
Filing Date:
March 04, 2008
Export Citation:
Assignee:
LAM RESEARCH CORPORATION
International Classes:
H01R13/24; H01R4/14; H01R13/533
Domestic Patent References:
| JP57047444U | ||||
| JP11260449A | ||||
| JP4124555U | ||||
| JP2002158053A |
Attorney, Agent or Firm:
Meisei International Patent Office